JPH0510355Y2 - - Google Patents
Info
- Publication number
- JPH0510355Y2 JPH0510355Y2 JP9771886U JP9771886U JPH0510355Y2 JP H0510355 Y2 JPH0510355 Y2 JP H0510355Y2 JP 9771886 U JP9771886 U JP 9771886U JP 9771886 U JP9771886 U JP 9771886U JP H0510355 Y2 JPH0510355 Y2 JP H0510355Y2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- microcomputer
- voltage signal
- etching
- converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 claims description 18
- 230000007423 decrease Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9771886U JPH0510355Y2 (en]) | 1986-06-27 | 1986-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9771886U JPH0510355Y2 (en]) | 1986-06-27 | 1986-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS635633U JPS635633U (en]) | 1988-01-14 |
| JPH0510355Y2 true JPH0510355Y2 (en]) | 1993-03-15 |
Family
ID=30964962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9771886U Expired - Lifetime JPH0510355Y2 (en]) | 1986-06-27 | 1986-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0510355Y2 (en]) |
-
1986
- 1986-06-27 JP JP9771886U patent/JPH0510355Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS635633U (en]) | 1988-01-14 |
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